• PWR-300

    PAD 연마량 측정, CMP DISK 불량 확인용

    - Feature
    # 300mm Pad Wear Rate Measurement System
    # Conditioner Head : CIP
    # Conditioner Down Force : 2 ~ 20 lbs
    # Automated Calculation of Cumulative Data
    # Micro Sensor : Resolution 0.5㎛

    - Application
    # Disk Pre break-in
    # Check Diamond
    # Cut Rate
    # PAD Debris
    # Disk Reproducilbilly Test

    - Model Description
    Model UNIT Items Type
    PWR300 PLATEN Motion Rotation
    Rotation Speed MAX 190 rpm
    CONDITIONER Motion Rotation / Sweep
    Dressing In / Ex-situ
    DD size 4 “
    OTHERS Micro Sensor Resolution 0.5㎛