AS 300_Spin Rinse Dryer

- Feature
# 8”-12” Wafer Dryer
# High Rotation Stability

- Application
# Wafer Clean & Wafer Dryer

- Model Description

Model	Items	Type
AS 300	Motion	Rotation
	Wafer Size	8”-12”
	N2 & D.I.W	Blowing
	Wafer Load	Manual
	Control	PC Base