PWR-300

PAD 연마량 측정, CMP DISK 불량 확인용

- Feature
# 300mm Pad Wear Rate Measurement System
# Conditioner Head : CIP
# Conditioner Down Force : 2 ~ 20 lbs
# Automated Calculation of Cumulative Data
# Micro Sensor : Resolution 0.5㎛

- Application
# Disk Pre break-in
# Check Diamond
# Cut Rate
# PAD Debris
# Disk Reproducilbilly Test

- Model Description

Model	UNIT	Items	Type
PWR300	PLATEN	Motion	Rotation
		Rotation Speed	MAX 190 rpm
	CONDITIONER	Motion	Rotation / Sweep
		Dressing	In / Ex-situ
		DD size	4 “
	OTHERS	Micro Sensor	Resolution 0.5㎛